JPH0176045U - - Google Patents
Info
- Publication number
- JPH0176045U JPH0176045U JP1987171478U JP17147887U JPH0176045U JP H0176045 U JPH0176045 U JP H0176045U JP 1987171478 U JP1987171478 U JP 1987171478U JP 17147887 U JP17147887 U JP 17147887U JP H0176045 U JPH0176045 U JP H0176045U
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- electrode
- electrostatic chuck
- attracted
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171478U JPH0176045U (en]) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171478U JPH0176045U (en]) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176045U true JPH0176045U (en]) | 1989-05-23 |
Family
ID=31463346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171478U Pending JPH0176045U (en]) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176045U (en]) |
-
1987
- 1987-11-10 JP JP1987171478U patent/JPH0176045U/ja active Pending